Vacuum Drying Equipmentとは 意味・読み方・使い方

VACUUM DRYING EQUIPMENT AND VACUUM DRYING METHOD例文帳に追加

減圧乾燥装置及び減圧乾燥方法 - 特許庁

FILTER FOR DECOMPOSING ODOR COMPONENT, WASHING/DRYING MACHINE, ELECTRIC VACUUM CLEANER, AIR-CONDITIONING EQUIPMENT AND REFRIGERATOR例文帳に追加

臭気成分分解フィルタ，洗濯乾燥機，真空掃除機，空調機及び冷蔵庫 - 特許庁

In the vacuum drying equipment to perform vacuum drying to a semiconductor wafer, for example, the equipment is constituted such that a rectifying plate that is a laminated body of first member having a large temperature conductivity, which is set facing a wafer surface, and second member having a small temperature conductivity, is provided so as to face the wafer with a small gap, and vacuum drying is performed.例文帳に追加

例えば半導体ウェハを減圧乾燥するための減圧乾燥装置において、ウェハ表面側に設定される温度伝導率の大きい第１の部材と、温度伝導率の小さい第２の部材との積層体である整流板を、ウェハと僅かな隙間をもって対向するように設けた状態で減圧乾燥を行う構成とする。 - 特許庁

To provide a vacuum freezing drying device to perform cooling freezing, heating sublimation, and temperature regulation in a short time with extremely high precision without needing conventional large separate equipment serving as a heating means and a cooling means for an object in a vacuum.例文帳に追加

真空中における対象物の加熱手段、および冷却冷凍手段として従来の大型別設設備を必要とせず、冷却凍結、加熱昇華および、温度調節を短時間に極めて高精度で行える真空凍結乾燥装置を提供する。 - 特許庁

To provide a method of preventing the contamination by exhaust air/waste water in a vacuum drying device, capable of minimizing the contamination of living environment caused by matters discharged from the device while minimizing the equipment cost and the operation cost.例文帳に追加

極力、設備費や運転経費を押さえながら、装置からの排出物による生活環境の汚染を最少限に抑えられる様に構成した、真空乾燥装置における排気・排水の汚染防止方法を提供する。 - 特許庁

The cleaning equipment is provided with a cleaning tank 1 to carry out a series of cleaning operations from soak cleaning to vacuum drying, a storage tank 2 to store the cleaning liquid, a steam generating tank 3 to boil the cleaning liquid under reduced pressure, a recovery tank 4 to introduce cleaning steam into the liquid to recover it, and a vacuum pump 5 to maintain each part under proper reduced pressure.例文帳に追加

浸漬洗浄から真空乾燥までの一連の洗浄動作を実現する洗浄槽１と、洗浄液を貯留する貯留槽２と、減圧状態で洗浄液を沸騰させている蒸気発生槽３と、洗浄蒸気を液中に導入して回収する回収槽４と、前記各部を適宜な減圧状態にする真空ポンプ５とを備える。 - 特許庁

To provide a method for a surface treatment in which an equipment can be easily constituted and miniaturized, and a surface reforming such as a wettability improvement or a surface treatment such as an ashing or an etching can be performed relatively easily at a low cost, without requiring an additional stage for a rinse in a wet etching or a drying, and without an expensive and large facility for a vacuum or a decompressing.例文帳に追加

ウエット法のリンスや乾燥のための追加工程を必要とせず、また真空や減圧のための高価で大型の設備を必要とせず、装置を簡単に構成しかつ小型化でき、濡れ性改善などの表面改質やアッシング、エッチングなどの表面処理を、比較的容易にかつ低コストで行うことができる新規な表面処理方法を提供する。 - 特許庁