duty cycle capacityとは 意味・読み方・使い方

To reduce the manufacturing cost of a semiconductor device by improving the duty cycle of a film-forming gas and to reduce the capacity of an industrial pretreatment facility by reducing the load imposed on the facility, and in addition, to reduce the investment cost for equipment of a semiconductor manufacturing apparatus and to make the maintenance load imposed on the manufacturing device lighter.例文帳に追加

成膜ガスの使用率を高め、半導体装置の製作コストの低減を図ると共に除害装置の負担を軽減することで、除害装置の小容量化を図り、半導体製造装置の設備コストを低減し、更にメインテナンスの負担を軽減する。 - 特許庁