「Edw」を含む例文一覧(1)
- To provide an actinic ray-sensitive or radiation-sensitive resin composition which resolves on a vertical sidewall in forming a contact hole pattern, ensures enhanced EDW, improves side lobe resistance, and reduced the number of Blob defects, as well as a resist film and a pattern formation method using the composition.
コンタクトホールパターン形成時に垂直な側壁にて解像し、広いＥＤＷを確保でき、サイドローブ耐性が良化し、かつＢｌｏｂ欠陥数が低減した感活性光線性又は感放射線性樹脂組成物、並びにそれを用いたレジスト膜及びパターン形成方法を提供する。 - 特許庁
- 特許庁
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