「Stocker」を含む例文一覧(753)
＜前へ 1 2 .... 6 7 8 9 10 11 12 13 14 15 16- To provide a method for manufacturing a semiconductor device which even in a production line of an existent semiconductor production factory constructed without assuming an automation of a conveyance of wafer cassettes which are carried out between a stocker and each semiconductor production apparatus, materializes the automation of a quick conveyance at a low cost, and supplies and recovers the wafer cassettes by the production line which materializes the automation of the quick conveyance.
ストッカと各半導体製造装置との間で行なわれるウェハカセットの搬送の自動化を前提としないで構築された既設の半導体製造工場の製造ラインにおいても、高速搬送の自動化を低価格で実現し、この高速搬送の自動化を実現した製造ラインにより、ウェハカセットの供給および回収を行なう半導体装置の製造方法を提供する。 - 特許庁 - The stocker comprises: a stocking section 35 for stocking electronic components as stocks; a component inlet/outlet 33 forming a zone for carrying the electronic components into/out of the stocking section 35; a grounding current detecting means 52 for detecting the existence of electrostatic charges on the electronic components carried into the inlet/outlet; and an ionizer 51 controlled based on the detection result.
電子部品を収納品とする収納品保管部３５と、前記収納品の該収納品保管部に対する搬出入領域となる収納品搬出入部３３と、該収納品搬出入部への前記収納品の搬入で該収納品の静電気帯電有無が検知し得るアース電流検知手段５２と、前記検知結果に基づいて制御されるイオナイザ５１と、を含んで構成する。 - 特許庁 - This article stocker S1 for storing many articles B1 in a loading state of which lower side is a discharge port 4d comprises a tilting conveying part 2 on the upside that linearly extends tiltingly downwardly and feeds the articles tiltingly downwardly, and a circuit arc conveying part 3 that extends like circular arc from the downside end of the tilting conveying part 2 on the upside and feeds the articles in the circular arc shape.
下方側が排出口４ｄとされ多数の物品Ｂ１が積載状態で収納される物品ストッカＳ１において、斜め下方に直線状に延びて物品を斜め下方に送り出す上方側の傾斜状搬送部２と、この上方側の傾斜状搬送部２の下方側の端部から円弧形状に延びて物品を円弧形状に送り出す円弧状搬送部３とを備える。 - 特許庁
- 特許庁
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