「charge diffusion effect」を含む例文一覧(1)
- To provide a method for generating a charged particle beam such as an electron beam, etc. for focusing the electron beam by suppressing the diffusion of the electron beam due to a space charge effect even when an electron density in the electron beam is increased and even when an exposure speed is accelerated, and to provide a charged particle beam device.
電子ビーム中の電子密度を増加させても露光速度を上げても、空間電荷効果による電子ビームの拡散を抑制して電子ビームを集束させる電子ビーム等の荷電粒子線の発生方法および荷電粒子線装置を提供する。 - 特許庁
- 特許庁
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