The solvent Q diffuses in a shape of a circle co-centric with the wafer W behind the diffusion direction of the pure water P (Fig.(b)). 溶剤Qは、純水Pよりも拡散方向後方でウェハWの同心円状に拡散する(図6(b))。 - 特許庁
The diffusion device is, for example, constituted of a reflector 15 which is parallel with the longitudinal direction of the light duct 4 and cross section thereof is a semi-circle, and reflects the light in different direction depending on its incident position to uniformize the density of the light beam inside the light duct 4. 拡散装置は、例えば、光ダクト4の長手方向に平行で断面が半円状の反射材15から構成され、光の入射位置に応じて、入射光を異なる方向に反射させ、光ダクト4内の光の密度を均一化する。 - 特許庁