To provide a process for fabricating a photoelectric conversion element exhibiting good interface characteristics to both an oxide based transparent conductive film and a photoelectric conversion layer in which a high conductivity is ensured while suppressing the quantity of light absorption by preventing the film quality of a p-layer from deteriorating due to the discompositioneffect of hydrogen from a semiconductor layer of impurities while securing good interface characteristics. 良好な界面特性を確保しながら不純物の半導体層からの水素の引き抜き効果によるp層の膜質低下を防止して高導電率を確保し、かつ光吸収量を抑制し、しかも酸化物系透明導電膜や光電変換層の双方に対して良好な界面特性をもつ光電変換素子を製造する方法を提供することを目的とする。 - 特許庁