To provide an atomic force microscope which can precisely detect interaction quantity due to interatomic force between a cantilever and a sample with a measurement method using light such as an optical lever method, even when the cantilever is driven in high speed in the Z direction, and to provide a cantilever support of the atomic force microscope. カンチレバーをZ方向に高速に駆動した場合にも、光てこ法等の光を使った測定法でカンチレバーの試料との間の原子間力による相互作用量を正確に検出できる原子間力顕微鏡及びそのカンチレバー支持具を提供する。 - 特許庁