「interbedded」を含む例文一覧(2)
- A polycrystal Si to be a heating resistor section, an interbedded insulation film 36, a metallic wiring pattern layer and a surface protection film 41 are formed on an SI substrate, then the interbedded insulation film 36 and surface protection film 41 are removed by a dry-etching method to open a pit 8 to form an opening.
Ｓｉ基板上に発熱抵抗体部となる多結晶Ｓｉ、層間絶縁膜３６、金属配線層、表面保護膜４１などを形成後、層間絶縁膜３６および表面保護膜４１をドライエッチングによって除去し、ピット８を開口させる。 - 特許庁 - A heating resistor section 31, an interbedded insulation film 36, a metallic pattern layer 38 and a surface protection film 41 are formed on an Si substrate in the above order.
Ｓｉ基板上に発熱抵抗体部３１、層間絶縁膜３６、金属配線層３８、表面保護膜４１をこの順で形成する。 - 特許庁
- 特許庁
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