「interconnection techniques」を含む例文一覧(2)
- PRESENCE TRACKING, AND NAME SPACE INTERCONNECTION TECHNIQUES
存在追跡および名前空間相互接続の技術 - 特許庁 - To provide a semiconductor device which forms a fine interconnection using buried interconnection forming techniques without causing the separation or deformation of an interlayer insulation film during processes, and which uses a film of low permittivity having low film strength as the interlayer insulation film.
埋め込み配線形成技術を適用して微細な配線を形成しつつも、プロセス中において層間絶縁膜の膜剥がれや変形などを発生させることなく、膜強度の低い低誘電率膜を層間絶縁膜として用いた半導体装置を得る。 - 特許庁
- 特許庁
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