「react native」を含む例文一覧(1)
- Further, the apparatus has a low temperature processing chamber wherein the native oxide film is made to react with an NF3 gas at a low temperature and a heating chamber wherein the product film is heated, and the chambers are provided separately.
また、低温で自然酸化膜にＮＦ３を反応させる低温処理室２０７と生成膜を加熱する加熱室２０９とを別々に有している。 - 特許庁
- 特許庁
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