The heat generating part is matched with an optical axis of the optical microscope 7 and found within a high magnification visual field based on the located position of the heat generating part, and irradiated by a laser beam in the same optical axis as the optical microscope 7 to segmentize the short part which is the heat generating part. 求められた発熱箇所の位置に基づき発熱箇所を光学顕微鏡7の光軸に一致させて高倍率視野内に捉えるとともに、光学顕微鏡7と同一の光軸でレーザを照射して発熱箇所であるショート箇所を分断する。 - 特許庁