By this setup, the movement of the substrates and the ascending motion of the undersetting jigs can be carried out as they are interlocking with each other, and a substrate transferring/receiving operation is capable of shortening its production unit time. これにより、基板の移動と下受け治具の上昇動作とを重ね合わせて行うことができ、基板搬送下受け動作のタクトタイムを短縮することができる。 - 特許庁