As for the penalty functions, target functions to calculate the residual of the constraint conditional formula are converged near zero so that the approximate solutions can be calculated. 罰金関数において、制約条件式の残差を取る目的関数をゼロ近傍に収束させることにより近似解を求める。 - 特許庁
At such a time, the light source part 311 and an illumination optical system are designed to satisfy a specified conditional expression, whereby the zero-order diffracted light and ±1st-order diffracted light are not superposed each other. このとき、所定の条件式を満たすように光源部311および照明光学系を設計することで、0次回折光と±1次回折光とが重なり合わないようにする。 - 特許庁