ガス吹き出し機構の英語

気体吹き出し機構４５は、回転ドラム４１の外周面近傍の側壁４９に沿って周方向に適宜間隔で配設された複数の気体吹き出し口４６と、該気体吹き出し口４６に加圧ガスを供給する加圧ガス発生装置とを備える。例文帳に追加

The gas blowing off mechanisms 45 are provided with a plurality of gas blowing off ports 46, which are arranged in properly spaced relation in the peripheral direction along the side wall 49 near the outer peripheral face of the rotary drum 41 and a pressure gas generator for supplying pressure gas to the gas blowing off ports 46. - 特許庁

さらに、前記ターゲットは、その長手方向を基板移動方向と垂直な方向に配置した矩形状ターゲットであり、該長手方向の両側に、多数のガス吹き出し孔を前記長手方向に形成したガス導入機構を設けたことを特徴とする。例文帳に追加

In addition, the target has a rectangular shape with the longitudinal direction thereof arranged in the direction perpendicular to the substrate moving direction, and has a gas introducing mechanism having a large number of gas outlets opened in the longitudinal direction and provided on both sides of the longitudinal direction of the target. - 特許庁