光波分光学の英語

この反射光学素子９は、蛍光波長のみを反射する分光透過率を有している。例文帳に追加

The reflecting optical element 9 has a spectral transmission for reflecting only the fluorescent wavelength. - 特許庁

本研磨監視方法は、基板の研磨中に、積層構造を有する基板の表面に光を照射し、基板から戻る反射光を受光し、反射光を波長に従って分解して分光波形を生成し、所定の光学干渉成分を選択的に除去するための数値フィルタを分光波形に適用して監視用分光波形を生成し、監視用分光波形の変化を研磨中に監視する。例文帳に追加

The method for monitoring polishing irradiates a surface of a substrate having a laminated structure with light during polishing of a substrate, receives reflected light returned from the substrate, decomposes the reflected light according to a wavelength to generate a spectral waveform, applies a numerical filter for selectively removing a predetermined optical interference component to the spectral waveform to generate a spectral waveform for monitoring, and monitors a change in the spectral waveform for monitoring during polishing. - 特許庁

光波長分割多重化信号１１をその成分光信号に分離する分散手段（例えば、光学要素３０）と、前記成分光信号を電気信号に変換する光検出器アレイ５４とを備える。例文帳に追加

The optical demultiplexer is equipped with a dispersive means (e.g. optical element 30) which separates a light wavelength-division multiplexed signal 11 into its component optical signals and a photodetector array 54 which converts the component optical signals into electrical signals. - 特許庁

光波干渉計測装置は、多波長光源１、偏光光学素子５、参照面６、被検面７、分光光学素子８、位相検出器９ａ、解析装置１０を備える。例文帳に追加

The device for measuring the optical interference includes a multi-wavelength light source 1, a polarization optical element 5, the reference surface 6, the surface 7 to be inspected, a spectral optical element 8, phase detectors 9a, and an analyzer 10. - 特許庁