electron beam acoustic microscopeとは 意味・読み方・使い方

This electronic microscope having an electron source, an electronic lens and an electron beam deflecting unit, further comprises an electron beam pulsing means and an acoustic wave measuring means, the energy of electrons entering into the sample is 1000 eV or less, and the measurement and examination of the inside of the sample are performed on the basis of the scanning information of the electron beam and the information of the detected sound.例文帳に追加

電子源、電子レンズ、電子線偏向器を有してなる電子顕微鏡装置において、さらに電子線パルス化手段、音波測定手段を備え、試料中に入射する電子のエネルギを１０００ｅＶ以下とし、電子線の走査情報と検出音の情報から試料内部の計測・検査をおこなう。 - 特許庁