英和和英

出典:『Wikipedia』 (2009/07/25 19:52 UTC 版)

英語による解説

引用

A Scanning Helium Ion Microscope (SHIM or HeIM) is a new imaging technology based on a scanning helium ion beam. This technology has several advantages over the traditional scanning electron microscope (SEM). Due to the very high source brightness, and the short De Broglie wavelength of the helium ions, which is inversely proportional their momentum, it is possible to obtain qualitative data not achievable with conventional microscopes which use photons or electrons as the emitting source. As the helium ion beam interacts with the sample, it does not suffer from a large excitation volume, and hence provides sharp images on a wide range of materials. Compared to a SEM, the secondary electron yield is quite high, allowing for imaging with currents as low as 1 femtoamp. The detectors provide information-rich images which offer topographic, material, crystallographic, and electrical properties of the sample. In contrast to other ion beams, there is no discernible sample damage due to relatively light mass of the helium ion.