CO2 partial pressureとは 意味・読み方・使い方

In this case, the gate oxide film 14 is formed by adjusting the partial pressure of the mixed gas of an oxidizing agent with an etchant so that the oxidizing agent (such as an N2O and an CO2) is combined with the etchant (such as H2) and the thin (to 12 Å) and high-quality oxide film 14 is controllably grown.例文帳に追加

ゲート酸化物（１４）が、酸化剤（例えばＮ_2Ｏ、ＣＯ_2）をエッチング剤（例えばＨ_2）と組合わせ、薄い（〜１２Å）高品質の酸化物（１４）を制御自在に成長させるように、分圧を調節することによって形成される。 - 特許庁