slow adsorptionとは 意味・読み方・使い方

The slow evacuation of the wafer processing container through a gas outlet 8 is started with the wafer kept vacuum-adsorbed for avoiding the adverse effect of fluctuation in pressure in the wafer processing container, and the wafer is released from adsorption thereafter (S23).例文帳に追加

ウェハー加工容器内のガス排出部８からスロー排気を始める際、加工容器内の圧力変動の影響を避けるためウェハーを真空吸着状態で開始、その後ウェハーの吸着解除する（Ｓ２３）。 - 特許庁

To provide a detection apparatus of a critical micellar concentration of a interfacial active agent by taking notice of an interfacial adsorption phenomenon and providing an optical transmission path with a detecting function and an information transmitting function so as to eliminate the weakness due to conventional defects, slow and troublesome measuring method.例文帳に追加

従来からの長時間、煩雑な測定方法の欠点を取り除くため、界面の吸着現象に注目し、かつ光伝送路に検知機能と情報伝達機能を与えて界面活性剤の臨界ミセル濃度の測定装置を提供する。 - 特許庁