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出典:Wikipedia
出典:『Wikipedia』 (2011/05/01 01:38 UTC 版)
A Scanning Acoustic Microscope (SAM) is a device which uses focused sound to investigate, measure, or image an object (a process called Scanning Acoustic Tomography). It is commonly used in failure analysis and non-destructive evaluation. It also has applications in biological and medical research. The semiconductor industry has found the Scanning Acoustic Microscope useful in detecting voids, cracks, and delaminations within microelectronic packages.