出典:Wikipedia
出典:『Wikipedia』 (2011/07/25 06:37 UTC 版)
The term Ultrapure Water offers a challenge in being described with a single definition. Until the advent of SEMI F63, Ultrapure Water (UPW) used for semiconductor manufacturing was loosely defined. The SEMI F63 template has been followed recently with a UPW version for photovoltaic cell manufacturing. For years SEMATECH has referred to UPW as “de-ionized and filtered water.” Additionally, the foremost publication devoted to the subject of UPW, The Journal of Ultrapure Water, reaches across a wide readership audience ranging from water used in electrical power generation to pharmaceutical to wafer fabrication in semiconductor houses. Likewise, ASTM D5127 recognizes a host of UPW water qualities.