O2 partial pressureとは 意味・読み方・使い方

In this case, the percentage of the partial pressure of O2 in the mixed gas is set to 1-10% of full gas pressure.例文帳に追加

この際、混合ガス中のＯ_2の分圧を全ガス圧の１〜１０％とする。 - 特許庁

The heat- treatment is performed under the conditions that the partial pressure of O2 gas with respect to O2 atmosphere or partial pressure of N2O gas with respect to N2O atmosphere is 250 Torrs or higher, the temperature is in the range of 350-450°C, and the heat-treatment time is in the range of 60-300 seconds.例文帳に追加

ウエハの熱処理は、Ｏ__2 雰囲気中のＯ_2 ガスの分圧、又はＮ_2 Ｏ雰囲気中のＮ_2 Ｏガスの分圧が２５０Torr以上で、３５０℃以上４５０℃以下の範囲の温度で、かつ６０秒以上３００秒以下の範囲の熱処理時間で行う。 - 特許庁

This ceramic is manufactured by the process wherein a powder compact containing iron additives is sintered in an atmosphere of comparatively low oxygen partial pressure (N2, 95N2-5H2, H2 etc.), then in the next process it is heat treated in the atmosphere of higher oxygen partial pressure than before (N2, 80N2-20O2, O2, etc,).例文帳に追加

鉄などの添加剤を含む粉末成形体を酸素分圧が相対的に低い雰囲気（Ｎ_２、９５Ｎ_２−５Ｈ_２、Ｈ_２など）で焼結した後、それより酸素分圧が高い雰囲気（Ｎ_２、８０Ｎ_２−２０Ｏ_２、Ｏ_２など）で熱処理する工程とからなる。 - 特許庁

An Xe2 excimer lamp 1 is lighted over a synthetic quartz window 2, and TEOS and an additive gas O2 are introduced in a vacuum chamber 3 to form a film on a wafer 6 for a forming time of 15 min with a gas flow rate of 100 sccm at a TEOS partial pressure of 300 mTorr.例文帳に追加

合成石英窓２上よりＸｅ_2 エキシマランプ１を照射し、真空チャンバ３内にＴＥＯＳ、添加ガスであるＯ_2 を導入することにより、ウエハ６上に成膜を行った。 - 特許庁