bell jarsとは 意味・読み方・使い方

The interval between both bell-jars 1a and 1b is made equal with the distance from the lower end of an aperture formed in each of the bell-jars 1a and 1b to the upper surface of the substrate 4.例文帳に追加

両ベルジャ１ａ，１ｂの間隔と、各ベルジャ１ａ，１ｂの開口部の下端から基板４の上面までの距離とを等しくする。 - 特許庁

Two bell-jars 1a and 1b, which are respectively provided with antennas 6a and 6b for generating helicon waves and coils 7a and 7b for generating a magnetic field on their peripheries, are made to communicate with a diffusion chamber 2 housed with a substrate 4 of a deposition object and are parallel-arranged.例文帳に追加

ヘリコン波発生用のアンテナ６ａ，６ｂ及び磁場発生用のコイル７ａ，７ｂを周囲に設けた２個のベルジャ１ａ，１ｂが、成膜対象の基板４を収容した拡散チャンバ２に連通させて並列に配設されている。 - 特許庁