confocal interference microscopeとは 意味・読み方・使い方

In the confocal microscope apparatus where reflected light L3 from an object S to be measured and reference light L2 are coupled, and the interference light L4 is detected by an interference light detecting means 6, then, the tomographic image of the object S is obtained, an optical modulation part 20 for carrying out the frequency modulation of the reference light L2 is provided.例文帳に追加

測定対象Ｓからの反射光Ｌ３と参照光Ｌ２が合波され、その干渉光Ｌ４が干渉光検出手段６により検出され測定対象Ｓの断層画像が取得される共焦点顕微鏡装置において、参照光Ｌ２の周波数変調を行う光変調部２０が設けられている。 - 特許庁

To provide a three-dimensional shape measuring device for measuring and displaying a three-dimensional shape efficiently by relating surface optical image information acquired by a confocal laser scanning type microscope with a simple configuration to height information acquired by a microscopic interference measurement method for management and easily acquiring the three-dimensional shape of a high-definition and high-resolution sample over a wide magnification range.例文帳に追加

簡単な構成で共焦点レーザ走査型顕微鏡によって取得される表面光学像情報と顕微干渉計測法によって取得される高さ情報を関連付けて管理し、広い倍率範囲に渡って高精細、高分解能な試料の３次元形状を容易に取得し、効率的にこの３次元形状を測定、表示する３次元形状測定装置を提供する。 - 特許庁