elemental impurityとは 意味・読み方・使い方

To provide a reaction vessel and a plasma processing apparatus free from elemental impurity contamination on a sample and damages by the plasma.例文帳に追加

元素不純物で試料が汚染されず、且つプラズマによる損傷が少ない反応容器及びプラズマ処理装置。 - 特許庁

The elemental analysis method can be applied to semiconductor device manufacturing processes to analyze metal contamination or quantify a conductivity determining impurity element on the inline basis and with a high degree of accuracy.例文帳に追加

また、当該元素分析方法を、半導体装置の製造工程に適用することで、金属汚染の分析や導電型決定不純物量の定量をインラインでかつ高精度に実施できる。 - 特許庁

To provide an elemental analysis method by which a metal impurity element present locally on the surface of or inside a semiconductor substrate and the like can be detected and quantified in a practically feasible period of time, and to provide a manufacturing method of a semiconductor device which is implemented on an inline basis.例文帳に追加

半導体基板等の表面または内部において局所的に存在する金属不純物元素を現実的な時間内で検出、定量可能な元素分析方法を提供する。 - 特許庁