primary thermometerとは 意味・読み方・使い方

The control in a primary cooling zone is executed so that the temperature detected with the thermometer 4 at the inlet side of the secondary cooling zone becomes the target temperature of ≥600°C.例文帳に追加

第１次冷却帯の制御は、第２次冷却帯入側温度計４で検出される温度が、600℃以上の目標温度になるように行う。 - 特許庁

As a result, primary light reflected on the reflection plane 50 is prevented from being made incident to a radiation thermometer 30c or the like, and the radiation thermometer 30c or the like exactly detects the intensity of light radiated from the wafer W and can highly accurately measure the temperature of the wafer W.例文帳に追加

その結果、反射面５０による１次反射光が放射温度計３０ｃ等に入射することが防止され、放射温度計３０ｃ等が基板Ｗからの放射光強度を正確に検出して高い精度にて基板Ｗの温度を計測することができる。 - 特許庁