Chuck Banksとは 意味・読み方・使い方

The substrate holding surface of a chuck 10 is provided with projecting parts 11, banks 12, a first suction mechanism, and a second suction mechanism.例文帳に追加

チャック１０の基板保持面には、凸部１１、土手１２、第１の吸着機構、及び第２の吸着機構が設けられている。 - 特許庁

A plurality of banks 11 are provided on the surface of a chuck 10 to form a plurality of vacuum sections 12 and a plurality of non-vacuum sections 13 extending across the width of the chuck.例文帳に追加

チャック１０の表面に、複数の土手１１を設け、複数の土手１１により複数の真空区画１２とチャックの幅に渡る複数の非真空区画１３とを形成する。 - 特許庁

A plurality of elongated substrate support members 32 whose height is lower than that of the plurality of banks 11 are disposed in the non-vacuum sections 13 of the chuck 10 across the width of the chuck 10, and both ends of the plurality of substrate support members 32 are attached to a frame 30 having the width larger than the width of the chuck 10.例文帳に追加

高さが複数の土手１１より低い複数の細長い基板支持部材３２をチャック１０の幅に渡ってチャック１０の非真空区画１３に配置し、複数の基板支持部材３２の両端をチャック１０の幅より大きな幅を有するフレーム３０に取り付ける。 - 特許庁