EUVLとは 意味・読み方・使い方

METHOD FOR CORRECTING AMPLITUDE DEFECT IN MULTILAYER FILM OF EUVL MASK例文帳に追加

ＥＵＶＬマスクの多層膜中の振幅欠陥修正方法 - 特許庁

METHOD OF MANUFACTURING MASK FOR EUVL AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE例文帳に追加

ＥＵＶＬ用マスクの製造方法および半導体装置の製造方法 - 特許庁

To improve the reliability of an EUV mask used in EUVL.例文帳に追加

ＥＵＶＬにおいて用いるＥＵＶマスクの信頼性を向上させる。 - 特許庁

To provide a substrate of a mask for use of EUVL with high flatness.例文帳に追加

平面度の高いＥＵＶＬ用マスクの基板を提供する。 - 特許庁

To provide a method of manufacturing a reflective mask for EUVL which is excellent in size controllability of a resist pattern.例文帳に追加

レジストパターンの寸法制御性に優れたＥＵＶＬ用マスクの製造方法の提供。 - 特許庁

To provide a method of smoothing an optical surface of an EUVL optical member which has concave defects.例文帳に追加

凹欠陥を有するＥＵＶＬ用光学部材の光学面を平滑化する方法を提供する。 - 特許庁

To provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL.例文帳に追加

ＥＵＶＬ用光学部材の凹欠点を有する光学面を平滑化する方法の提供。 - 特許庁

To provide TiO_2-SiO_2 glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL.例文帳に追加

ＥＵＶＬ用露光装置の光学系部材として好適な熱膨張特性を有するＴｉＯ_2−ＳｉＯ_2ガラスの提供。 - 特許庁