atomic charge distributionとは 意味・読み方・使い方

While the surface of channels of a field effect transistor is being scanned by a probe, the surface potential of the channels and potentials by trap charge just beneath the probe at each point are measured through potential measurement using an atomic force microscope, and the local mobility is calculated from the measured potentials, and further the distribution of mobility is obtained based on the mobilities calculated at each point.例文帳に追加

探針で電界効果トランジスタのチャンネル表面を走査しながら、各点において探針直下のチャンネルの表面電位およびトラップ電荷による電位を、原子間力顕微鏡を用いた電位測定により測定し求めた電位から局所的な移動度を算出し、さらに各点で算出された移動度に基づいて移動度分布を求める。 - 特許庁