electronic relaxation processとは 意味・読み方・使い方

To obtain an electronic element having a plurality of films, wherein the electronic element can cope with stress relaxation to a film which causes expansion or contraction even a change in material during high-temperature heat treatment in a manufacture process of a semiconductor or the like.例文帳に追加

複数の膜を有する電子素子において、膨張又は収縮を起こす膜に対する応力緩和を、半導体等の製造プロセスにおける高温熱処理時の物性変化においても対応可能とすること。 - 特許庁