far surface resolutionとは 意味・読み方・使い方

To provide a method for evaluating a wafer including a step of measuring an infinitesimal internal crystal defect in which a BMD from the front surface of a wafer to be measured to the depth of about 10 μm can be observed with high resolution of a depthwise direction of the wafer and with a difficulty to measure so far.例文帳に追加

被測定ウェーハの深さ方向の高い分解能を有し、かつ、今まで測定することが困難であった被測定ウェーハの表面から１０μｍ程度の深さまでのＢＭＤを観察可能とした微小内部結晶欠陥の測定によるウェーハの評価方法を提供する。 - 特許庁

To provide a radiation sensitive resin composition having sensitivity to active light rays such as far-ultraviolet light represented by an ArF excimer laser, for example, superior in the flatness of a pattern surface without impairing fundamental material properties such as transparency to radiation, sensitivity, a resolution, and a pattern shape, and useful as a chemical amplification type resist which is improved against pattern collapse on a substrate.例文帳に追加

活性光線、例えばＡｒＦエキシマレーザー等に代表される遠紫外線等に感応し、放射線に対する透明性、感度、解像度、パターン形状等の基本物性を損なわずに、パターン表面の平滑性に優れ、かつ基板上でのパターン倒れが改善された化学増幅型レジストとして有用な感放射線性樹脂組成物を提供する。 - 特許庁