interfacial damageとは 意味・読み方・使い方

To provide a semiconductor device manufacturing method and a semiconductor device causing no interfacial delamination between a gate electrode and an interlayer insulating film and no damage to an irradiated object regardless of high speed heating by light irradiation for activation.例文帳に追加

活性化のための光照射による急速加熱を行っても、ゲート電極と層間絶縁膜の界面剥離や、被照射物に損傷を与えることのない半導体装置の製造方法及び半導体装置を提供すること。 - 特許庁

To provide a single crystal pull device so designed that the temperature of a susceptor is lowered to reduce the damage on the aimed single crystal due to heat and the temperature distribution of a melt is controlled to uniformize the melt's interfacial temperature distribution, or the oxygen concentration of the melt is lowered.例文帳に追加

単結晶引上装置において、サセプタの低温化を図り熱によるダメージを低減するとともに融液の温度分布を制御し、界面温度分布の均一化を図ること、または低酸素濃度化を図ること。 - 特許庁