reactive plasmasとは 意味・読み方・使い方

To provide a dummy wafer and a cleaning wafer which are given a conductivity enabling an attraction and resist all reactive plasmas and the costs of which are reduced, in an electrostatic type wafer holder used for a semiconductor production device.例文帳に追加

半導体製造装置で使用される静電型ウエハー保持装置にて、吸着が可能な導電性を持たせ、あらゆる反応性プラズマに耐え、かつ安価なダミーウエハー、クリーニングウエハーを提供すること。 - 特許庁

The high-frequency plasma source is formed by arranging a plurality of vessels for discharge within one high-frequency plasma coil and is constituted in such a manner that plasmas of reactive gases are formed within the respective vessels of a plurality of the vessels for discharge and that substrates are irradiated with the plasmas from plasma spouts disposed at the respective vessels for discharge.例文帳に追加

一つの高周波コイル内に複数個の放電用容器を配置してなり、該一つの高周波コイルによって複数個の放電用容器の各容器内に反応ガスのプラズマを生成して、このプラズマが各放電用容器に設けられたプラズマ噴出口から基板に照射されるように構成される高周波プラズマ源。 - 特許庁