derotateとは 意味・読み方・使い方

Measuring of the thickness of the surface deterioration layer is performed, by etching the torn surface of the resist mask by an isoamyl acetate, after making a non-exposed resist with a surface deterioration layer as a convex part, and making a derotate section conspicuous as a recess, the thickness of the convex part of the section is measured by SEM.例文帳に追加

表面変質層の膜厚の測定は、レジストマスクの破断面を酢酸イソアミルでエッチングし、表面変質層を凸部、未露光レジストを凹部として断面に顕彰化させた後、ＳＥＭで断面の凸部の厚さを測定する。 - 特許庁