speckle interferometryとは 意味・読み方・使い方

SPECKLE REDUCTION METHOD AND SYSTEM FOR EUV INTERFEROMETRY例文帳に追加

スペックル低減方法およびＥＵＶ干渉法のためのシステム - 特許庁

DEFORMATION MEASUREMENT METHOD AND DEVICE USING ELECTRONIC SPECKLE INTERFEROMETRY例文帳に追加

電子的スペックル干渉法を用いた変形計測方法および装置 - 特許庁

VIBRATION MEASUREMENT METHOD AND APPARATUS USING ELECTRONIC SPECKLE INTERFEROMETRY例文帳に追加

電子スペックル干渉法を用いた振動の測定方法および測定装置 - 特許庁

To provide a speckle reduction method and a system for EUV interferometry by which a wavefront quality measurement in an optical lithography tool is improved to be made even during wafer fabrication and exposure, without forcing the tool during measurement to be off-line.例文帳に追加

光リソグラフィツールにおける波面品質測定が、測定中のツールのオフラインを強いることなくウエハ作製／露光中でも可能となるように改善を行うこと。 - 特許庁

To provide a speckle reduction method and a system for EUV interferometry by which a wavefront quality measurement in an optical lithography tool is improved to be made even during wafer fabrication and exposure, without forcing the tool during measurement to be off-line.例文帳に追加

光リソグラフィツールにおける波面品質測定が、測定中のツールのオフラインを強いることなくウエハ作製/露光中でも可能となるように改善を行うこと。 - 特許庁

To provide a speckle interferometry system of a two-flux illuminating direction switchable type, which simultaneously and precisely carry out respective phase shift operations about illuminations of two fluxes in directions different from each other.例文帳に追加

互いに異なる方向からの２光束照射に係る各々の位相シフト操作を高精度に同時に行なうことが可能な２光束照射方向切替型のスペックル干渉計装置を得る。 - 特許庁

To provide a method and a device used for accurately measuring dynamic deformation, vibration, distortion or the like of an observing object by using an electronic speckle interferometry, and capable of facilitating a phase unlapping process to an extent allowing detection of a connection point of a phase change curve to be automated in executing the phase unlapping process of the phase change curve in a time domain.例文帳に追加

電子的スペックル干渉法を用いて、観察物体の動的な変形、振動、歪等を高精度に計測する方法および装置において、時間領域における位相変化曲線の位相アンラッピング処理を行う際に、該位相変化曲線における位相の接続点の検出を自動化する程度まで容易なものとする。 - 特許庁