trimethylindiumとは 意味・読み方・使い方

To provide a means which can highly sensitively and easily sense a metal compound such as trimethylgallium, trimethylindium, trimethylaluminum and the like contained in a gas exhausted from a semiconductor manufacturing process or the like, without being affected by a carrier gas such as ammonia or the like, or a means which can carry out a concentration measurement about them.例文帳に追加

半導体製造工程等から排出されるガスに含まれるトリメチルガリウム、トリメチルインジウム、トリメチルアルミニウム等の金属化合物等を、アンモニア等の同伴ガスに影響されることなく、高感度で容易に検知あるいは濃度測定できる手段を提供する。 - 特許庁