turbulent plasmaとは 意味・読み方・使い方

To prevent any film from sticking on the side of a plasma film forming apparatus without making the flow of its processing gas turbulent, in the atmospheric-plasma film forming apparatus.例文帳に追加

常圧プラズマ成膜装置において、処理ガスの流れを乱すことなく、装置側への膜付着を防止する。 - 特許庁

Because the shield has no unevenness, it makes a treatment gas smoothly flow, prevents plasma convergence due to the turbulent flow of the treatment gas, and makes the plasma treatment uniformly performed on the whole of the film.例文帳に追加

シールドには凹凸がないので、処理ガスを円滑に流れ、処理ガスの流れの乱れに起因するプラズマ集中が防止され、プラズマ処理が膜全体に均一に行われる。 - 特許庁

Sample gas introduced through a capillary pipe 16 is mixed with the plasma gas and the dilution gas by a turbulent flow generated by a collision between the plasma gas and the dilution gas, and sample components thereof are efficiently ionized by light from plasma without being affected by light shielding by sample components thereof having high density.例文帳に追加

キャピラリ管１６を通して導入された試料ガスはプラズマガスと希釈ガスとの衝突により生じる乱流によりそれらガスと混じり、試料成分は濃い試料成分による光遮蔽の影響を受けずに、プラズマからの光により効率的にイオン化される。 - 特許庁

The carbon material for an electrode is formed through plasma treatment process conducting high frequency thermal plasma treatment to a raw material composition of carbon or an organic material in a plasma gas atmosphere containing a boron-containing compound so that a region near the surface of the carbon material is made into a turbulent layer structure in the vicinity of the surface of the carbon material and also cleaning and surface-reforming are attained.例文帳に追加

ホウ素含有化合物を含むプラズマガス雰囲気中において、炭素又は有機材料からなる原料組成物に対して高周波熱プラズマ処理を施すプラズマ処理工程を経て電極用炭素材料を形成させることにより、炭素材料の表面近傍の乱層構造化とともに、クリーニング、表面改質を併せ行う。 - 特許庁