water front developmentとは 意味・読み方・使い方

To raise a controllability of a line width of a pattern, while reducing a developing defect, in case of forming a protective film of a water repellent property on a substrate an which a resist film is formed, and performing a development processing to the substrate after forming a liquid layer on a front surface of the protective film and carrying out an oil immersion exposure.例文帳に追加

レジスト膜が形成された基板の上に撥水性の保護膜を形成し、その表面に液層を形成して液浸露光した後の基板に現像処理を行うにあたって、現像欠陥を低減させると共にパターンの線幅の制御性を向上させること。 - 特許庁

To provide an alkaline development method for reducing line width dispersion, which is produced when developing is stopped with hardly a time difference between the front end part and the rear end part of a glass substrate 11 during water rinsing, after consecutive developing which is carried out through conveyance via a plurality of developing tanks 20, in the longitudinal direction of the glass substrate.例文帳に追加

複数の現像槽２０中を搬送しながら連続して現像し、続く水洗にてガラス基板１１の先端部と後端部との間で殆ど時間差なく現像を停止した際に発生する、ガラス基板の長さ方向の線幅のバラツキを縮小するアルカリ現像方法を提供する。 - 特許庁