ひとみ関数の英語

照明装置に対応して照明ひとみおよび投影ひとみに従って決定される透過交差係数（「ＴＣＣ」）関数を定義し、基板に印刷すべきマスクの少なくとも１つの解像可能な特徴を少なくとも１つのインパルス関数で表し、さらに少なくとも１つのインパルス関数およびＴＣＣ関数に基づいて所定の次数の干渉マップを作ることで、照度を最適化する。例文帳に追加

The illumination is optimized by defining a transmission cross coefficient ("TCC") function determined correspondingly by a lighting pupil and a projection pupil according to a lighting device, by expressing at least one impulse function for resolvable features of at least one of masks which should be printed to a substrate, and by further making an interference map of a specified order based on at least one impulse function and the TCC function. - 特許庁

照明光学系の瞳面を分割した複数の領域における光強度に対して線形関係である第１目的関数と瞳面の各領域における光強度に対して線形関係でない第２目的関数とに基づいて、瞳面に形成されるべき光強度分布を決定する。例文帳に追加

A light intensity distribution which is to be formed on a pupil surface is decided based on a first target function that has a linear relationship with the light intensity in a plurality of regions available by dividing the pupil surface of an illumination optical system, and a second target function which does not have a linear relationship with the light intensity in the regions of pupil surface. - 特許庁

積分処理部１１は、積分を行って瞳関数のカットオフ周波数により規定される範囲内の透過クロス係数（ＴＣＣ）を求める。例文帳に追加

An integrating processor 11 gets the transmission cross coefficient(TCC) within the range stipulated by the cut off frequency of the pupil function by performing integration. - 特許庁

周波数算出部１０は、近接効果の及ぶ範囲により定まるマスク周期から瞳関数のカットオフ周波数を特定する。例文帳に追加

A frequency computer 10 specifies the cut-off frequency of a pupil function from the mask cycle determined by the range that the proximity effect reaches. - 特許庁

この結果、有効光源と瞳関数に周期性を仮定せず、離散化誤差をなくして高次の成分を省略した透過クロス係数（ＴＣＣ）を求めることで、高速で精度のよい光強度分布の計算を行う。例文帳に追加

As a result, this performs the high-speed and accurate computation of light intensity distribution by getting the transmission cross coefficient where high- order components are omitted by removing the discretization errors, without supposing periodicity for the effective light source and the pupil function. - 特許庁

測定器において、結像光学系（９）または照射光学系（８）の瞳面内に、或いは、これに対して共役な照射光路（４，５）または結像光路（１１）内の面内に、光源（６，１３）の光の強度に連続単調関数の推移特性を与える手段（１４，１５）を設ける。例文帳に追加

This measuring instrument is provided with means 14, 15 for imparting transition characteristics of continuous monotone functions to intensities of lights from light sources 6, 13, within a pupil face of an image focusing optical system 9 or an irradiation optical system 8, or within a plane of irradiation optical paths 4, 5 conjugated thereto or an image focusing optical path 11. - 特許庁

被写界深度外処理回路１２の画像処理回路２７は映像信号に対しフィルタ処理を行う回路であり、光学的伝達関数のレスポンス、ならびに瞳変調素子によって発生する非対称な収差（ボケ）を復元する画像処理を行う。例文帳に追加

The image processing circuit 27 of a depth-of-field external processing circuit 12 is a circuit for applying filtering processing to an image signal and performs the response of an optical transmission function and image processing for restoring asymmetric aberration (blur) generated by a pupil modulation element. - 特許庁