radical 202とは 意味・読み方・使い方

In the pretreatment process, RPH (Remote Plasma Hydrogenation) treatment for supplying hydrogen radical onto a substrate is performed (202), RPN (Remote Plasma Nitriding) treatment for supplying nitrogen radical onto the substrate is performed (203), and then RPO (Remote Plasma Oxidation) treatment for supplying oxygen radical onto the substrate is performed (204) in the middle of substrate temperature increment for increasing a substrate temperature to a depositing one.例文帳に追加

前処理工程は、基板温度を成膜温度まで昇温させる基板昇温の途中で、水素ラジカルを基板上に供給するＲＰＨ（リモートプラズマ水素化）処理を行い（２０２）、その後、窒素ラジカルを基板上に供給するＲＰＮ（リモートプラズマ窒化）処理を行い（２０３）、その後、酸素ラジカルを基板上に供給するＲＰＯ（リモートプラズマ酸化）処理を行う（２０４）。 - 特許庁

In the process A, a film-forming material is supplied (202) to allow inorganic starting gas to attach to the substrate being unreacted during the heating of the substrate up to a film-forming temperature, and an oxygen radical is supplied to the substrate for performing (203) RPO (remote plasma oxidation) treatment to form the first film layer thereon.例文帳に追加

第１薄膜層形成工程Ａは、基板温度を成膜温度まで昇温させる基板昇温加熱の途中で、有機原料ガスを基板上に未反応のまま付着させる成膜原料供給を行なった後（２０２）、酸素ラジカルを基板上に供給して第１の薄膜層を形成するＲＰＯ（リモートプラズマ酸化）処理を行なう（２０３）。 - 特許庁