I am sorry to have caused you anxiety.
I am sorry to make you worry.
I apologize for causing you concern.
I am sorry to make you worry.
I am sorry for worrying you.
I'm very sorry for troubling you.
I am sorry to have inconvenienced you.
I am sorry for causing you such inconvenience.
ご不便をおかけし申し訳ございません。
I am terribly sorry for bothering you.
I am sorry that I caused you to worry.
I am sorry for worrying you.
I am terribly sorry for causing the inconvenience.
I am sorry for inconveniencing you.
I am terribly sorry for causing you worry.