Residue depthとは 意味・読み方・使い方

To provide a radiation-sensitive resin composition which has a large depth of focus, ensures small LWR and little residue on dissolution in development and hardly causes development defects.例文帳に追加

焦点深度が広く、ＬＷＲが小さく、現像時の溶け残りが少なく現像欠陥が発生し難い感放射線性樹脂組成物を提供する。 - 特許庁

To provide a positive resist composition which is enhanced in resolving power, reduced in residue on development and improved in process admissibility such as a margin for exposure and a focal depth in lithography using a short- wavelength light source for exposure capable of ultra-microfabrication and a positive chemical amplification resist.例文帳に追加

超微細加工が可能な短波長の露光光源及びポジ型化学増幅レジストを用いたリソグラフィー技術にあって、解像力が向上し、現像残査が低減し、露光マージンや焦点深度等のプロセス許容性が改善されたポジ型レジスト組成物を提供すること。 - 特許庁