The delay line interferometer inside the demodulator performs adjustment of phase difference between two split lights caused to interfere, using a phase modulation unit such as a piezo actuator and a phase modulation unit such as a heating element that operates slower in modulation speed than the first optical phase modulation unit and is slower deterioration speed.例文帳に追加

復調器内部の遅延干渉計において、干渉させる2つの分岐光の位相差の調整をピエゾ素子などの位相調整手段と、第一の位相調整手段よりも低速で動作し、かつ劣化速度が遅い発熱体などの位相調整手段とを用いて行う。 - 特許庁

To provide a real-time measurement branch type interferometer that takes a real-time measurement of light interference with high precision by suppressing disorder of a wavefront during passage through an optical element for converting a reference light and a test light into two circular polarized lights which have mutually opposite rotational directions of polarization.例文帳に追加

参照光および被検光を偏光の回転方向が互いに逆向きとなる２つの円偏光に変換するための光学素子を通過する際の波面の乱れを抑制し、実時間での光干渉測定をより高精度に行うことが可能な実時間測定分岐干渉計を得る。 - 特許庁

The orthogonal two-phase signal of the interferometer is converted into the polar coordinate, then calculation for emphasizing only a changed part of the radius element is performed, it is converted into the orthogonal coordinate again, and it is displayed similarly to the Lissajous's waveform, thereby obtaining a display resolution required for adjustment.例文帳に追加

干渉計直交２相信号を極座標に変換した後、半径成分の変動分のみを強調する演算を行い、再び直交座標に変換し、リサージュ波形と同様に表示することにより、調整に必要な表示分解能を得ることができる。 - 特許庁