チャクの英語

各チャック部材１０ａ，１０ｂ，１０ｃの設置高さが微妙に異なり、チャック部材とチャク部材との境界１０ｄ，１０ｅに段差があっても、チャック１０に搭載された基板１は、境界１０ｄ，１０ｅを含む領域で真空吸着されないので、段差に倣うことなく緩やかに変形する。例文帳に追加

Even when placement heights of the chuck members 10a, 10b, 10c slightly differ or boundaries 10d, 10e between the chuck members have a level difference, the substrate 1 mounted on the chuck 10 loosely deforms without following up the level difference, as the substrate 1 is not vacuum-sucked in the region including the boundaries 10d, 10e. - 特許庁

各チャック部材１０ａ，１０ｂ，１０ｃに、基板１を真空吸着する１つ以上の真空区画を設け、チャック部材とチャク部材との境界１０ｄ，１０ｅを含む領域に、基板１を真空吸着しない非真空区画を設けて、各チャック部材の真空区画により基板１を真空吸着する。例文帳に追加

Each chuck member 10a, 10b, 10c is provided with one or more vacuum segments for vacuum-suction of a substrate 1 while a non-vacuum segment where the substrate 1 is not vacuum-sucked is disposed in a region including boundaries 10d, 10e between the chuck members so as to vacuum-suck the substrate 1 by the vacuum segment of each chuck member. - 特許庁