suspectorとは 意味・読み方・使い方

METHOD FOR MANUFACTURING CERAMIC SUSPECTOR例文帳に追加

セラミックスサセプタの製造方法 - 特許庁

To provide a vapor-phase growth apparatus which can prevent reduction in the yield of acceptable products by detecting the contact between a suspector and a flow channel, and to provide a method of detecting susceptor and flow channel contact of the vapor-phase growth apparatus.例文帳に追加

上記課題を解決し、サセプタとフローチャネルの擦れを検知して、良品歩留の低下を防止することができる気相成長装置のサセプタ擦れ検知方法及び気相成長装置を提供する。 - 特許庁

To provide a structure which can guarantee stable and reliable substrate lift operation of a substrate support jig which make a substrate vertically move relatively to the surface of a susceptor by the vertically moving motion of the suspector, and a reliable blockade of a through hole formed in the susceptor.例文帳に追加

サセプタの昇降運動によって相対的にサセプタ表面に対して基板を昇降させる基板支持治具の安定確実な基板リフト動作及びサセプタ貫通孔の確実な遮断を保証しうる構造を提供する。 - 特許庁

The mounting structure is equipped with the susceptor 2 for heating an object to be treated, the support member 7 which is joined to the suspector 2 and in which an inside space 6 is formed, and a chamber which is provided with an opening joined to the support member 7.例文帳に追加

取付構造は、被処理物を加熱するためのサセプター２と、サセプター２に接合されており、内側空間６が設けられている支持部材７と、支持部材７に接合されている開口が設けられたチャンバーとを備える。 - 特許庁