生じ始めの亀裂の英語

部品表面とＣＶＤ付着物との密着性を従来以上に高め、該ＣＶＤ付着物から形成される膜の表面に亀裂が生じ始める膜厚を増大させて、該ＣＶＤ付着物の剥離に基づくパーティクルなどの不純物の発生を抑制すると共に、部品自身からの発塵も防止し得るガラス状炭素製のＣＶＤ装置用部品と、その製造方法を提供する。例文帳に追加

To provide a component for a glassy carbon CVD device that can suppress the occurrence of impurities such as particles or the like due to peeling of CVD deposits by improving adhesiveness between the surface of the component and the CVD deposits and increasing a film thickness wherein cracking starts on the surface of a film formed by the CVD deposits and can prevent the generation of dust from itself, and to provide its manufacturing method. - 特許庁