optical interferometryとは 意味・読み方・使い方

To provide a method for producing a multilayer film with small dispersion of the thickness of the multilayer film and of each layer within the film, by making the thickness of each layer accurately measurable with optical interferometry.例文帳に追加

光干渉方式で、各層の厚みを正確に測定可能にすることにより多層フィルムおよびフィルム内各層の膜厚バラツキの少ない多層フィルムの製造方法を提供する。 - 特許庁

To provide a surface shape measuring method capable of long-range measurement by improving measurement accuracy in two-wavelength phase-shifting interferometry and only slightly improving a conventional phase-shift optical system.例文帳に追加

２波長位相シフト干渉法の計測精度を改善し、従来の位相シフト光学系のわずかな改良で長レンジの計測を可能とする表面形状測定方法を提供する。 - 特許庁

To provide a speckle reduction method and a system for EUV interferometry by which a wavefront quality measurement in an optical lithography tool is improved to be made even during wafer fabrication and exposure, without forcing the tool during measurement to be off-line.例文帳に追加

光リソグラフィツールにおける波面品質測定が、測定中のツールのオフラインを強いることなくウエハ作製／露光中でも可能となるように改善を行うこと。 - 特許庁

To provide a speckle reduction method and a system for EUV interferometry by which a wavefront quality measurement in an optical lithography tool is improved to be made even during wafer fabrication and exposure, without forcing the tool during measurement to be off-line.例文帳に追加

光リソグラフィツールにおける波面品質測定が、測定中のツールのオフラインを強いることなくウエハ作製/露光中でも可能となるように改善を行うこと。 - 特許庁

This polyester film for optical uses having a coated layer having an easily bondable property with the curable resin on at least one of the film surfaces is characterized by having ≥0.7 density (number/mm^2) of projections having ≥5th interference patterns observed by a double beam interferometry, on the coated layer surface.例文帳に追加

硬化性樹脂に対して易接着性を有する塗布層を少なくとも一方のフィルム面に有し、当該塗布層表面における二光束干渉法で観察される５次以上の干渉縞を有する突起の密度（個／ｍｍ^２）が０．７以上であることを特徴とする光学用ポリエステルフィルム。 - 特許庁