recoil atomとは 意味・読み方・使い方

Since adverse influence is exerted on the film deposition when recoil atoms from an electron beam heating source 22 reach the substrate W to be treated, a recoil atom control board 23 for preventing the arrival of the recoil atoms at the substrate W to be treated is provided; thus the charge potential of the substrate W to be treated is controlled.例文帳に追加

電子ビーム加熱源２２からの反跳電子が被処理基板Ｗに到達してしまうと膜形成に悪影響を及ぼすため、被処理基板Ｗに反跳電子が到達するのを防ぐための反跳電子制御板２３を設けて、被処理基板Ｗのチャージ電位を制御する。 - 特許庁