misreportsとは 意味・読み方・使い方

Difference between the images cased by the difference in film thickness in a wafer can be permitted thereby, and generation of misreports can be prevented without degrading the sensitivity.例文帳に追加

これにより、ウェハ内の膜厚の違いにより生じる画像間の違い等を許容でき、感度を落とさず虚報の発生を防止できる。 - 特許庁

On a micro locational deviation part, reduction in the occurrence of misreports and highly sensitive inspection are implemented by a single low threshold value on a whole area to be inspected by a means for especially intensively computing overall brightness between the images as necessary.例文帳に追加

微小な位置ずれ部分では、必要に応じて画像間の明るさを特に強く合わせ込む手段により、検査対象領域全体に対して唯一の低しきい値で虚報の発生低減と高感度検査を実現する。 - 特許庁

In the case that an object to be inspected is a semiconductor wafer, by the computing means for previously computing the brightness difference between the images caused by the difference of a film thickness in the wafer, it is possible to avoid the occurrence of misreports due to brightness irregularities without reduction in sensitivity and easily perform sensitivity adjustment by the single threshold value.例文帳に追加

また、検査対象が半導体ウェハであった場合、ウェハ内の膜厚の違いにより生じる画像間の明るさの違いをあらかじめ合わせ込む手段により、感度を落とさずに明るさむらによる虚報の発生を避け、かつ、唯一のしきい値で容易に感度調整を可能とする。 - 特許庁

To provide a defect inspecting method and apparatus with easy sensitivity adjustment capable of both inspecting locational deviation in an image to be inspected, image distortion, etc., by considering brightness between the images and of reducing misreports and highly sensitively detecting defects only by setting a threshold value in defect inspection for comparing the image to be inspected with a reference image and detecting the defects from their difference.例文帳に追加

検査対象画像を参照画像と比較してその差異から欠陥を検出する欠陥検査において、対象画像内の位置ずれや画像歪み等について、画像間の明るさを合わせ込んで検査を行うとともに、しきい値設定のみで虚報の低減と欠陥の高感度検出を両立させ、感度調整が容易な欠陥検査方式及び装置を提供する。 - 特許庁